• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    ACTUATOR TO MOVE A MlCROMECHANICAL ELEMENT. The present invention relates to an actuator for moving a rigid element, for example an optical element such as a mirror (1), the element being mechanically coupled to a frame (4) with a deformable coupling (2A), wherein the actuator elements (3A, 3B) are mounted in said coupling between the frame and the element, the coupling and the actuator elements being adapted to provide movement to the element when subjected to a signal from a signal generator.
    公开号:BR112012006044B1
    申请号:R112012006044-9
    申请日:2010-09-16
    公开日:2021-08-31
    发明作者:Thor Bakke；Ib-Rune Johansen；Andreas Vogl；Frode Tyholdt；Dag Thorstein Wang
    申请人:Sintef Tto；
    IPC主号:
    专利说明:

    [001] The present invention relates to an actuator unit for moving a rigid element, preferably optical, for example, a mirror. It especially refers to an actuator to move a micromirror with a stroke of more than 9μm at 20V formed of a silicon sheet on insulator with integrated piezoelectric actuators that is shown. The primary application is a Fabry-Perot interferometer for infrared gas spectroscopy.
    [002] In tunable Fabry-Perot interferometers and other devices it is a challenge to provide the sufficiently large and reliable displacement of a rigid optical element, such as a mirror, in micromechanical devices. Piezoelectric actuators have been tested, but as they are limited to movement in one direction, the available movements were not sufficient.
    [003] Piezoelectric thin films integrated with MEMS allow long stroke actuation at low voltages [1]. An additional advantage is that piezoelectric films generate large forces, so actuators can be made harder and more robust than what is possible with commonly used electrostatic actuators. The use of such elements was discussed in WO2006/110908 and JP2007-206480, both of which show the use of piezoelectric actuators that move a rigid element. Both, however, rely on deformable spars to control the position and orientation of the element, which is, in production cost, the complexity and long-term reliability of the unit. Thus, it is an object of the present invention to provide a compact actuator unit that is not expensive to produce using MEMS technology and providing a robust and reliable unit that is controllable to the precision required for optical use such as interferometers.
    [004] The object of this invention is obtained by providing an actuator unit as described above and characterized as presented in the independent claims.
    [005] Herein, according to a preferred embodiment of the invention a new micromirror is presented which is vertically deflected using a double ring symmetric actuator. The micromirror has a wide range of applications in optics and micro-optics, but the primary purpose is a Fabry-Perot interferometer for infrared gas spectroscopy [2, 3].
    [006] The actuator unit is compatible with standard MEMS production and provides a robust means to move micromirrors or similar rigid devices with sufficient precision.
    [007] The invention is described below with reference to the attached drawings that illustrate the invention by way of examples, in which:
    [008] figure 1a, b illustrates a mobile micromirror according to the invention.
    [009] figure 2a, b illustrates a preferred embodiment of the embodiment illustrated in figure 1a, b.
    [010] Figure 3 illustrates a preferred embodiment of the invention used in a Fabry-Perot interferometer.
    [011] Figure 4 shows the deflection obtained from a mode as illustrated in Figure 2a, b.
    [012] Figure 5a to c illustrates alternative embodiments of the invention based on essentially circular membrane and piezoelectric actuators.
    [013] Figure 6a to c illustrate alternative embodiments of the invention.
    [014] Figure 7a a g illustrates the process of producing the modality illustrated in Figure 6a, b, c.
    [015] Figure 1a and b illustrates a 3D model of a rigid element 1, for example, a micromirror, formed from a SOI sheet comprising a thin layer of silicon device 2, a buried oxide layer 6 and a thick layer silicon handling temperature 7. The device is provided with a ring-shaped piezoelectric actuator 3 positioned on the membrane which defines the coupling area 2a between frame 4 and rigid element 1. Actuator 3 deflects the disc with an open opening in the center (figure 1a). The rigid element disk 1 is the full thickness of the handling silicon sheet 7 and is held in place by the thin layer of silicon from the device 2 which constitutes the membrane 2a around the edge of the disk 1. The membrane 2a is shown as a continuous membrane that surrounds the rigid element, but may have inlets at suitable positions, for example, for the pressure balance between the cavity below the element and the environment. The optical element 1 is rigid so as to maintain essentially the same shape when moved by the actuator element 3 and the actuator element 3 is preferably positioned close to either the frame 4 or the rigid element 1 so that when the piezoelectric material contracts the part. of the actuator positioned on the diaphragm is deformed upwards, thus pulling the diaphragm in this direction.
    [016] The device shown in figure 1a, b is formed of a silicon sheet on insulator (SOI) as described above by etching the silicon of the device 2 as well as the buried oxide 6 in the central part of the device, as seen in top view of figure 1a. The bottom side is dimensioned as seen in the bottom view of figure 1b, where the SOI handling silicon layer 7 was etched through the buried oxide 6, leaving a rigid element, for example, which constitutes a mirror plate with hard disk shape 1 which is held in place by the silicon layer of the device 2a which forms a membrane around the circumference of the rigid element 1 on its top side. A ring-shaped (i.e., annular) piezoelectric film 3 is structured on top of the thin silicon of the device holding the central disc, the piezoelectric film preferably being made from lead zirconate titanate (PZT). On actuation, the piezoelectric film contracts in the radial direction, causing the silicon membrane of device 2a to deform through a bimorph effect. Due to the circular symmetry of the structure, this deformation causes an out-of-plane deflection of the disk 1. In this way, an actuator unit can, according to a preferred embodiment of the invention, be produced being constructed from a single SOI element with PZT actuator elements applied on the surface, thus being suitable for simple and cost-effective production.
    [017] The preferred design contains two ring-shaped actuators 3a, 3b as shown in figure 2a and 2b. This allows for symmetrical actuation of the center disc, as illustrated in figure 2b as the membrane 2a is deformed upwards when the outer actuator 3b is contracted while the membrane is deformed downwardly when the inner actuator 3a is contracted. As both the frame and the rigid element are rigid, the outer actuator (the largest diameter) will pull the membrane and so, in the optical upward direction, while the actuation of the inner disk (the smallest diameter) will pull the membrane and so, the rigid element in downward direction. This solution extends the possible range of movement for rigid element 1.
    [018] The primary application of the rigid element as a disc-shaped micromirror is as part of a Fabry-Perot interferometer illustrated in figure 3. In this application, the top surface of disc 1 is coated with an anti-reflective layer ( AR) 11 while it is the background surface that acts as a mirror for the light 13 that passes through the unit, but other choices can be made depending, for example, on the distance 15 required between the mirrors 16, 17 formed by the surfaces above and below the cavity. Mirrors 16, 17 can either be provided with reflective coatings or the reflective index of the material itself, such as silicon, can provide the necessary reflectivity. By connecting (blade scale) the mirror to a second unstructured silicon lamina 10 which is also coated with AR on one side 12, a cavity 15 is formed in which light can undergo multiple reflections. The AR 11.12 coating and possible reflective coatings on the resonator cavity can be provided in any suitable way, for example using dielectric layers in suitable thicknesses or photonic crystals.
    [019] The height of gap 15 determines which wavelength will constructively interfere and then be completely transmitted through the interferometer. For the PF interferometer to be applicable to infrared spectroscopy in the wavelength range of 3 to 10μm, a stroke of several micrometers is desirable for sufficient tuning capability. The Fabry-Perot Interferometer is formed by the disk-shaped micromirror that is bonded to a second silicon wafer that uses adhesive bonding with a polymer such as BCB 9.
    [020] As illustrated in figure 3, the Fabry-Perot can include leak channels in the BCB layer 9 for pressure balancing, as well as end stops 14. The end stops 14 can be used for calibration, on-demand that the rigid element can be positioned on the end stops and the position can be controlled with respect to it. As will be discussed below, different types of position measuring means can be used, such as when using optical, capacitive or piezo resistive measuring means. An end stop for upward movement can also be provided, for example in a housing containing the interferometer.
    [021] The micromirrors were manufactured as part of a multi-project blade (MPW) process developed and standardized for industrial use as described in [1], which is included herein by reference and will not be described in detail in gift. In this process, the piezoelectric elements are mounted on the membrane, and the piezoelectric film used to form the actuators is lead zirconate titanate (PZT) which is sandwiched between a platinum bottom electrode and a gold top electrode. For micromirror fabrication, wet corrosion of the back cavity was replaced by deep reactive ionic corrosion (DRIE) for better dimensional control.
    [022] Other means to mount the piezoelectric elements 3 in the area of the membrane 2a can also be contemplated depending on the available technology and intended use of the element.
    [023] The starting SOI sheet used according to the preferred embodiment of the invention has 380μm of handling silicon, 7,300 nm of buried oxide 6 and an 8μm device 2 silicon layer. For micromirror fabrication, backside corrosion was performed using deep reactive ionic corrosion (DRIE).
    [024] It is noted that the micromirror is designed so that the part of the device's silicon layer that holds the central disc of the mirror is not structured in the region where it connects the back gap to the handling silicon, but forms a continuous membrane . This increases the strength of the structure significantly and keeps the microcrystalline silicon free from any defects that could easily crack if forced into the manufacturing process.
    [025] After cutting, the piezoelectric actuators of the finished devices were polarized by applying 20V at a temperature of 150°C for 10 minutes.
    [026] The measurements were performed using a finished micromirror of the type shown in figure 2 where the region in the middle is the free opening, which for the device shown has a diameter of 3 mm and the double ring actuators 3a , 3b have gold top 3c, 3d electrodes.
    [027] The performance characteristic of the mirror was measured with a ZYGO white light interferometer. The mirror was pushed upwards by applying 20V to the inner actuator, and upwards with a voltage of 20V that is applied to the outer ring. Note that the mirror disk remains perfectly flat in both cases. This is due to the high hardness of the silicon disc which has the full thickness of the handling silicon blade.
    [028] The high hardness of the mirror disc also allows the fabrication of mirrors with a diameter much larger than the 3 mm presented here. It was found that the structures formed are incredibly robust, so openings of 5 to 10 mm should be feasible.
    [029] The full characteristic for the micromirror with the two actuators is shown in figure 4. A total stroke of 9.3 µm for the mirror plate is achieved when applying an actuation voltage of 20V to each of the two actuators in sequence. Hysteresis is a typical feature of PZT-based actuators. Feedback is required for accurate positioning. This can be done optically when using a reference laser. In future designs, however, piezoresistors will be added to the device's silicon that is part of the actuators to allow for closed-loop operation and highly accurate mirror positioning. The micromirror actuation characteristic then provides an actuator in which the 0 to 20 V voltage sweep applied to the outer actuator ring generates the upper curve, while applying the same scan to the inner ring generates the lower curve. The total stroke is 9μm.
    [030] Then, a micromirror was presented, which achieves a travel of 9μm at 20V when using a symmetrical double-ring actuator. The mirror is formed from the handling silicon of an SOI sheet. The high hardness guarantees a high flatness of action. Large mirrors with openings of more than 3mm are manufactured more successfully. The mirror is highly suitable for its primary application which is a Fabry-Perot interferometer for gas spectroscopy.
    [031] Figures 5a to 5c illustrate the embodiments of the invention based on the ring-shaped membrane 2a that provides the coupling means between the rigid element 1 and the frame 4. In figure 5a, the piezoresistors 5 are positioned below the actuator piezoelectric 3 thus measuring the deformation in the membrane at the same position as the deformation is given.
    [032] Figure 5b illustrates that the rigid element, although rigid at the edges, may have a rigid frame that contains a hole or hollow area provided with a thin central membrane.
    [033] Figure 5c illustrates another ring-shaped membrane 2a, but in which the actuator is divided along the circumference into four sections 3a1, 3a2, 3a3, 3a4. According to the preferred embodiment of the invention, corresponding internal actuator parts will be provided. In figure 5c, the position measuring means which are provided as piezoresistors 5 are positioned in the gaps between the actuator sections. An advantage with the separate actuator sections is that they can provide tilt movement in addition to the translation movement and thus some adjustments or calibrations in the position and orientation of the rigid element.
    [034] Figures 6a and 6b illustrate an alternative embodiment of the invention, in which the rigid element 1 has a central input and an optical element 17a made of a glass or quartz is attached to it, as seen in the cross section of the unit shown in figure 6b. Thus, the rigid element 1 may comprise an element 17a provided with a transmission spectrum suitable for the relevant wavelengths if used in an optical measurement, such as a Fabry-Perot filter. In this way, the unit can be used in the visible and near infrared or ultraviolet ranges, depending on the material chosen, while a rigid element 1 made of silicon will be suitable for wavelengths above approximately 1100nm.
    [035] Figures 7a to 7g describe the production process to make the unit shown in figure 6b, where the drawings show cross sections of the unit at different stages of production.
    [036] As can be seen in figures 7a and 7b, this unit shares the same starting point as the other modalities discussed above, starting with an SOI structure with a piezoelectric actuator ring as discussed with reference to figures 1a, 3 and 5a, and wherein the device layer is etched from the area to be used as rigid element 1.
    [037] The top of the unit carrying the piezoelectric actuator is then temporarily attached to a carrier blade 20 as shown in figure 7c. This can be accomplished when using a polymer 21, such as Brewer Science's WaferBOND. The central area, as well as the membrane area, is then etched as shown in Figure 7d leaving an inlet in the central area where the device layer was removed and a membrane where the device layer was intact.
    [038] A layer of glass or quartz is then bonded to the unit from below, for example, using the BCB binder, as illustrated in figure 7e. The binder has to be strong enough to keep the blade and glass permanently connected, and the BCB binder is suitable due to the combination of relatively low temperature and high strength.
    [039] The active part 17a of the optical element that constitutes a part of the rigid element is then separated from the rest of the glass or quartz layer, for example, by powder blasting, which leaves the structure illustrated in figure 7f.
    [040] After removing the temporary carrier sheet, the unit is finalized and can be mounted to an optical drive similar to the unit illustrated in figure 3, but where the non-structure silicon layer 10 can be a glass or quartz layer that it is transparent in the same wavelength ranges as the transparent part 17a of the rigid element 1. Suitable anti-reflective and reflective layers can be applied to the surfaces in any suitable well-known manner.
    [041] To summarize, the invention then relates to an actuator for moving a rigid element, for example, an optical element such as a lens, a mirror or an at least partially transparent and partially reflective window, where the element it is mechanically coupled to a frame with a deformable membrane that provides a coupling. The elements of the actuator are mounted on said coupling membrane between the frame and the element, the membrane and the elements of the actuator being adapted to provide movement to the element when subjected to the signal from a signal generator. Preferably, the actuator elements comprise at least the piezoelectric element mounted on said coupling membrane which is adapted to deform said coupling on application of a voltage, as the piezoelectric element is adapted to contract in the direction of the coupling between the frame and the rigid element.
    [042] In an especially preferred embodiment, each element of the actuator is made up of two PZT elements, the first being mounted in the close coupling of the frame, the second is mounted in the close coupling of the rigid element, and coupled to the signal generator such as to be operated independently of each other or preferably in an alternative way so that one of them moves the rigid element in a first direction and the other moves the rigid element in the opposite direction of the first.
    [043] In an embodiment of the invention, the coupling is constituted by a thin and circular section of the frame, with the at least one piezoelectric element extending along the coupling. In a preferred version, two piezoelectric elements are used, as described above, to increase the movement length.
    [044] In any modality, the actuator can be provided with the position measuring means to provide feedback on the position of the rigid element with respect to the frame, and in the modality using the piezoelectric elements 3, the position measuring means is preferably also a piezo resistive element 5 provided in the coupling to monitor the deformation of the coupling. Piezo resistive elements 5 can be positioned below piezoelectric actuators 3 or in other positions where the coupling is deformed.
    [045] The piezoresistors can be made in the silicon layer on the insulator through ion implantation and subsequent annealing. With this doping procedure a pn junction can be produced, which defines the geometry of the resistors. The resistor can be contacted with additional larger doped areas, which are connected with a surface plating layer in later process steps. The process steps to manufacture the piezoresistors can be performed before depositing the bottom electrode into the piezoelectric layer. Such doped piezoresistors are used as voltage sensors and normally mounted in a Wheatstone bridge configuration with four deformable resistors. Other configurations, for example a half-bridge, are also possible depending on available space in the mechanical structure and process tolerances.
    [046] Instead of piezoresistors, optical or capacitive solutions can be used to measure the position of the rigid element.
    [047] As illustrated in figure 3, the invention also relates to an interferometer that includes an actuator as described above, especially a Fabry-Perot interferometer. The rigid element has an at least partially reflective surface, the frame being mounted in a housing comprising a second reflective surface, at least one of the reflective surfaces being provided in an at least partially transparent body and the two reflective surfaces being positioned at a distance from each other that constitutes a Fabry-Perot element, and the distance is adjusted by the movements induced by said actuator elements.
    [048] The invention also relates to a reflection device that includes an actuator, where the rigid element constitutes a mirror or is at least partially transparent in a chosen wavelength range and the piezoelectric actuators are divided into individually circle segments controls that are capable of tilting the rigid element to adjust for misalignment or directing light in a chosen direction. BIBLIOGRAPHY [1] "Taking piezoelectric microsystems from the laboratory to production", H. Röder, F. Tyholdt, W. Booij, F. Calame, NP 0stb0, R. Bredesen, K. Prume, G. Rijnders, and P. Muralt, J Electroceram (2007) 19:357 to 362 [2] "Infrared detection of carbon monoxide with a micromechanically tunable silicon Fabry-Perot filter", Hâkon Sagberg, Alain Ferber, Karl Henrik Haugholt, and Ib-Rune Johansen , IEEE Conf. on Optical MEMS (2005) [3] “Tunable infrared detector with integrated micromachined Fabry-Perot filter”, Norbert Neumann, Martin Ebermann, Steffen Kurth, and Karla Hiller, J. Micro/Nanolith. MEMS MOEMS 7, 021004 (2008)
    权利要求:
    Claims (17)
    [0001]
    1. Actuator unit of a MEMS type for moving a rigid element (1), eg an optical element, the actuator unit comprising a frame (4) and a deformable membrane (2a) surrounding the element, the circumference of the rigid element (1) being mechanically coupled to said frame (4) through said deformable membrane (2a), wherein said actuator unit comprises at least one actuator element (3), the at least one actuator element (3) being mounted on said deformable membrane (2a) between the frame and the rigid element (1), which defines a coupling area, characterized in that the deformable membrane (2a) and the actuator elements are adapted to provide movement in a direction out of the membrane plane to the rigid element (1) when subjected to the signal from a signal generator on deforming said deformable membrane (2a), wherein said at least one actuator element ( 3) consists of two piezoelectric elements (3a, 3b) assembled those in said deformable membrane (2a) being adapted to deform said membrane on application of a signal, and wherein a first (3b) of said piezoelectric elements (3a, 3b) is mounted in the coupling area facing the frame (4 ), and a second piezoelectric element (3a) is mounted in the coupling area facing the rigid element (1), thus being able to pull the rigid element up and down.
    [0002]
    2. Actuator unit according to claim 1, characterized in that the deformable membrane (2a) is constituted by a thin circular section of the frame (4), and said piezoelectric elements (3a, 3b) are ring-shaped elements that extend along the membrane around the rigid element (1).
    [0003]
    3. Actuator unit according to claim 2, characterized in that the ring-shaped piezoelectric element is divided into numerous individually controlled sections.
    [0004]
    4. Actuator unit according to claim 1, characterized in that the actuator is divided into four sections (3a1, 3a2, 3a3, 3a4) distributed along the deformable membrane (2a) surrounding the rigid element (1 ).
    [0005]
    5. Actuator unit according to claim 1, characterized in that it comprises a position measuring means that monitors the position of the rigid element (1) in relation to the frame (4).
    [0006]
    6. Actuator unit according to claim 5, characterized in that the position measuring means includes a piezoresistor (5) applied to the coupling in a position so as to indicate the deformation of the coupling and then the position , if the optical element is with respect to the frame.
    [0007]
    7. Actuator unit according to claim 5, characterized in that the position measuring means includes a capacitive or optical sensor adapted to measure the position if the optical element is with respect to the frame.
    [0008]
    8. Actuator unit according to claim 1, characterized in that said at least one piezoelectric actuator is a lead zirconate titanate (PZT) actuator.
    [0009]
    9. Reflection device that includes an actuator unit as defined in claim 1, characterized in that the rigid element (1) comprises a mirror.
    [0010]
    10. Interferometer including an actuator unit as defined in claim 1, characterized in that the optical element has an at least partially reflective surface (16), the frame (4) being mounted in a housing comprising a second reflective surface (17), at least one of the reflective surfaces being provided in an at least partially transparent body and the two reflective surfaces (16, 17) being positioned at a distance from each other that constitutes the Fabry-Perot element, being the distance adjusted by the movements induced by said actuator elements (3).
    [0011]
    11. Interferometer according to claim 10, characterized by the fact that the deformable membrane (2a) is constituted by a thin and circular section of the frame, wherein said at least one piezoelectric element with a ring shape extends along the deformable membrane (2a) around the rigid element.
    [0012]
    12. Interferometer according to claim 11, characterized by the fact that the ring-shaped piezoelectric element is divided into numerous individually controlled sections.
    [0013]
    13. Interferometer according to claim 10, characterized in that the actuator is divided into four sections (3a1, 3a2, 3a3, 3a4) distributed along the deformable membrane (2a) that surrounds the rigid element (1 ).
    [0014]
    14. Interferometer according to claim 10, characterized in that it comprises a position measurement means that monitors the position of the rigid element (1) with respect to the frame (4).
    [0015]
    15. Interferometer according to claim 14, characterized in that the position measuring means includes a piezoresistor (5) applied to the coupling in a position so as to indicate the deformation of the coupling and then the position if the optical element is in relation to the frame.
    [0016]
    16. Interferometer according to claim 14, characterized in that the position measuring means includes a capacitive or optical sensor adapted to measure the position if the optical element is with respect to the frame.
    [0017]
    17. Interferometer according to claim 10, characterized in that said at least one piezoelectric actuator is a lead zirconate titanate (PZT) actuator.
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    法律状态:
    2020-09-01| B06U| Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]|
    2020-09-29| B25D| Requested change of name of applicant approved|Owner name: STIFTELSEN SINTEF (NO) |
    2020-10-20| B25A| Requested transfer of rights approved|Owner name: SINTEF TTO (NO) |
    2021-07-06| B09A| Decision: intention to grant [chapter 9.1 patent gazette]|
    2021-08-31| B16A| Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]|Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 16/09/2010, OBSERVADAS AS CONDICOES LEGAIS. PATENTE CONCEDIDA CONFORME ADI 5.529/DF, QUE DETERMINA A ALTERACAO DO PRAZO DE CONCESSAO. |
    优先权:
    申请号 | 申请日 | 专利标题
    NO20093022A|NO336140B1|2009-09-18|2009-09-18|Micro optical device actuator|
    NO20093022|2009-09-18|
    PCT/EP2010/063628|WO2011033028A1|2009-09-18|2010-09-16|Actuator for moving a micro mechanical element|
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